Pressure-Dependent Langmuir Probe Characteristics of DC Gas Discharge Plasmas
DOI:
https://doi.org/10.2025/bpjq5x36Abstract
In this letter, the behavior of Langmuir probe in dc gas discharge plasma was explored for argon and nitrogen gases via the current-potential characteristics at different gas pressures. It was found that these characteristics apparently depend on the gas pressure and type. In argon discharge, the electron current rapidly increases with positive potential to reach the saturation, while the current decreases with increasing pressure due to collisions. In nitrogen discharge, the curve is distorted at gas pressure of 1 mbar due to the nonlinear space charge layers, and then flattened at 10 mbar due to the dense collisional plasma that reduces the charge transfer efficiency when compared to argon discharge.
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