Electrical Characteristics of DC Glow-Discharge Plasma under Different Operation Conditions
Abstract
In this work, a novel design of closed-field unbalanced dual magnetrons was used in a plasma sputtering system to improve the electrical characteristics of the plasma. This improvement was shown by the Langmuir probe diagnostics of the plasma and the values of plasma parameters, such as electron and ion temperatures and densities. The applicability of such a design may enhance the whole sputtering process and the production of nanoscale structures with low cost, high purity, and good properties.
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