Optical Properties of Nickel Oxide Thin Films Prepared by Closed-Field Unbalanced Dual-Magnetron Sputtering
Abstract
In this work, a homemade reactive closed-field unbalanced dual magnetrons sputtering system was employed to prepare nickel oxide nanostructures with high purity and spherical geometries. The inter-electrode distance between two identical magnetrons was varied to control the configuration of magnetic field distribution between them, and hence the properties of the prepared samples. The experimental parameters of the magnetron sputtering system were optimized to obtain NiO films with properties agreed to the published works. Such properties of the prepared structures were introduced to indicate the applicability of the homemade system in synthesizing nanostructures from metal oxide at low cost, good reliability and good properties.
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