Absorption Characteristics of Ag-doped Titanium Nitride Nanostructures Prepared by Reactive Co-sputtering
DOI:
https://doi.org/10.2025/5h3g4888Abstract
In this work, nanostructured silver-doped titanium nitride thin films were deposited on glass substrates by dc reactive co-sputtering technique. Results showed that the low nitrogen content in the gas mixture leads to enhance the absorbance of the prepared films due to the contribution of local surface plasmon resonance of silver nanoparticles in the titanium nitride matrix. On the other hand, the high content of nitrogen in the gas mixture leads to lower absorbance due to the degradation of structural and optical properties of the prepared nanostructures as a result of increasing defects and surface oxidation.
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