APL007-2-5 Characteristics of CoO/Si Heterostructure Prepared by Plasma-Induced Bonding
Abstract
In this work, the characteristics of the CoO-Si structure produced by plasma-induced bonding technique were studied. The produced structure was an asymmetric heterojunction consisting of n-type CoO on a p-type silicon substrate. The Si substrate and CoO sample were bonded by subjecting them to the plasma formed between two electrodes. The measurements included the structural and electrical characteristics. The built-in potential of the produced heterojunction is about 0.9eV with typical spectral responsivity within the range 300-900 nm. With dark current of 50μA, maximum reverse bias current of 180μA and ideality factor of 1.18, the results explained better characteristics than those of the same heterojunction produced by thermal evaporation technique.
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